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Instrument >> Instrument for Wafer >> Wafer Defect observing instrument:HS-WDI
                


 


■Application

■Semiconductor wafer

■Solar wafer

■Solar Cell

■Thin-film Cell













■Can measure distance between any two points

■Large advanced light and dark field objective, long working distance , high definition vision

■Stable, high-quality optical system, better contrast image








 






 








■Magnification: 50X-1000X 

■Digital camera: > 300 million pixel CCD 

■X, Y move range: 150mm × 180mm 

■Resolution:0.00042mm

■Accuracy:±1μm

■Magnification:100X(objective),10/15X(Eyepiece)
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